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1

Removal of the Metallorganic Polymer Residues Formed at Via Holes

Song, Jongkook, Kim, Jong-Soo, Seo, Hyungtak, Kim, Yangdo, Jeon, Hyeongtag

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 1.18 MB

english, 2004

2

Microstructure and magnetic properties of nanosized Fe–Co alloy powders synthesized by mechanochemical and mechanical alloying process

Baek-Hee Lee, Bong Su Ahn, Dae-Gun Kim, Sung-Tag Oh, Hyeongtag Jeon, Jinho Ahn, Young Do Kim

Journal:

Materials Letters

Year:

2003

Language:

english

File:

PDF, 191 KB

english, 2003

3

Removal of the Polymer Formed at Via Hole with Via Etching Stopped on an Al layer Structure

Song, Jongkook, Kim, Jong-Soo, Seo, Hyungtak, Kim, Yangdo, Jeon, Hyeongtag

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 586 KB

english, 2003

4

Growth and Characterization of Heteroepitaxial Nickel Films on Diamond Substrates

Humphreys, T. P., Jeon, Hyeongtag, Nemanich, R. J., Posthill, J. B., Rudder, R. A., Malta, D. P., Hudson, G. C., Markunas, R. J., Hunn, J. D., Parikh, N. R.

Journal:

MRS Proceedings

Year:

1990

Language:

english

File:

PDF, 3.31 MB

english, 1990

5

Characteristics of low- κ SiOC films deposited via atomic layer deposition

Lee, Jaemin, Jang, Woochool, Kim, Hyunjung, Shin, Seokyoon, Kweon, Youngkyun, Lee, Kunyoung, Jeon, Hyeongtag

Journal:

Thin Solid Films

Year:

2018

Language:

english

File:

PDF, 775 KB

english, 2018

6

Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N 2 plasma for gate spacer

Jang, Woochool, Kim, Hyunjung, Kweon, Youngkyun, Jung, Chanwon, Cho, Haewon, Shin, Seokyoon, Kim, Hyunjun, Lim, Kyungpil, Jeon, Hyeongtag, Lim, Heewoo

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2018

Language:

english

File:

PDF, 1.78 MB

english, 2018

7

Leakage current suppression in spatially controlled Si-doped ZrO 2 for capacitors using atomic layer deposition

Lee, Kunyoung, Jang, Woochool, Kim, Hyunjung, Lim, Heewoo, Kim, Bumsik, Seo, Hyungtak, Jeon, Hyeongtag

Journal:

Thin Solid Films

Year:

2018

Language:

english

File:

PDF, 2.35 MB

english, 2018

8

Surface morphology of TiSi2 on silicon

Hyeongtag Jeon, R.J. Nemanich

Journal:

Thin Solid Films

Year:

1990

Language:

english

File:

PDF, 473 KB

english, 1990

9

Electromagnetic shielder compatible ZnO transparent conducting oxides hybridized with various sizes of Ag metal nanoparticles

Jin Yong Kim, Hyeong-Ho Park, A. Sivasankar Reddy, Ho Jung Chang, Hyeongtag Jeon, Youngchul Chang, Hyung-Ho Park

Journal:

Ceramics International

Year:

2008

Language:

english

File:

PDF, 489 KB

english, 2008

10

Microstructural characterization at the interface of Al2O3/ZnO/Al2O3 thin films grown by atomic layer deposition

Yong Woon Jang, Seokhwan Bang, Hyeongtag Jeon, Jeong Yong Lee

Journal:

physica status solidi (b)

Year:

2011

Language:

english

File:

PDF, 598 KB

english, 2011

11

The effects of post-annealing on the performance of ZnO thin film transistors

Seokhwan Bang, Seungjun Lee, Joohyun Park, Soyeon Park, Youngbin Ko, Changhwan Choi, Hojung Chang, Hyungho Park, Hyeongtag Jeon

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 887 KB

english, 2011

12

Synergistic Interaction between Substrate and Seed Particles in Ultrathin Ultrananocrystalline Diamond Film Nucleation on SiO 2 with Controlled Surface Termination

Lee, Hak-Joo, Jeon, Hyeongtag, Lee, Wook-Seong

Journal:

The Journal of Physical Chemistry C

Year:

2012

Language:

english

File:

PDF, 3.44 MB

english, 2012

13

Characteristics of Ti-Capped Co Films Deposited by a Remote Plasma ALD Method Using Cyclopentadienylcobalt Dicarbonyl

Lee, Keunwoo, Kim, Keunjun, Park, Taeyong, Jeon, Hyeongtag, Lee, Youngjin, Kim, Jeongtae, Yeom, Seungjin

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 541 KB

english, 2007

14

Some novel aspects of nanocrystalline diamond nucleation and growth by direct current plasma assisted chemical vapor deposition

Lee, Hak-Joo, Li, H., Jeon, Hyeongtag, Lee, Wook-Seong

Journal:

Diamond and Related Materials

Year:

2010

Language:

english

File:

PDF, 1.74 MB

english, 2010

15

Stabilized resistive switching behaviors of a Pt/TaO x /TiN RRAM under different oxygen contents

Jeon, Heeyoung, Park, Jingyu, Jang, Woochool, Kim, Hyunjung, Kang, Chunho, Song, Hyoseok, Kim, Honggi, Seo, Hyungtak, Jeon, Hyeongtag

Journal:

physica status solidi (a)

Year:

2014

Language:

english

File:

PDF, 882 KB

english, 2014

16

Investigation of the surface chemical and electronic states of pyridine-capped CdSe nanocrystal films after plasma treatments using H[sub 2], O[sub 2], and Ar gases

Wang, Seok-Joo, Kim, Hyuncheol, Park, Hyung-Ho, Lee, Young-Su, Jeon, Hyeongtag, Chang, Ho Jung

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2010

Language:

english

File:

PDF, 450 KB

english, 2010

17

Ultrananocrystalline diamond film deposition by direct-current plasma assisted chemical vapor deposition using hydrogen-rich precursor gas in the absence of the positive column

Lee, Hak-Joo, Jeon, Hyeongtag, Lee, Wook-Seong

Journal:

Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 2.32 MB

english, 2011

18

Characteristics of Polymer Residues Formed at the Via Hole and Photoresist Ashing Properties of Remote Oxygen/Nitrogen Plasma

Kim, Sung Bae, Seo, Hyungtak, Song, Jongkook, Kim, Yangdo, Soh, Hyun, Kim, Young Chai, Jeon, Hyeongtag

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 131 KB

english, 2003

19

The Effects of Pretreatment, C H 4 Gas Ratio and Bias Potential on the Microstructure of Microwave Plasma Enhanced Chemical Vapor Deposited Diamond Thin Films

Park, Jong-Wan, Lee, You-Kee, Lee, Sei-Hyun, Cho, Kwang-Joon, Lee, Jae-Suk, Lee, Seoghyeong, Jeon, Hyeongtag, Choi, Ji-Hwan

Journal:

Japanese Journal of Applied Physics

Year:

1997

Language:

english

File:

PDF, 101 KB

english, 1997

20

Nucleation and Morphology of TiSi2 on Si

Nemanich, R. J., Jeon, Hyeongtag, Sukow, C. A., Honeycutt, J. W., Rozgonyi, G. A.

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 4.87 MB

english, 1992

21

Properties of Flexible Phosphorescence Polymer Light Emitting Diodes Coated on Polyethylenenaphthalate Plastic Substrates

Baek, Seung-Jun, Gong, Su-Choel, Chang, Young-Chul, Park, Hyung-Ho, Jeon, Hyeongtag, Chang, Ho-Jung

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2012

Language:

english

File:

PDF, 2.50 MB

english, 2012

22

Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition

Lee, Jaesang, Lee, Seung Jae, Han, Won Bae, Jeon, Heeyoung, Park, Jingyu, Jang, Woochool, Yoon, Chong Seung, Jeon, Hyeongtag

Journal:

phys stat sol (a)

Year:

2013

Language:

english

File:

PDF, 1.48 MB

english, 2013

23

Investigation of ultrathin Pt/ZrO2–Al2O3–ZrO2/TiN DRAM capacitors Schottky barrier height by internal photoemission spectroscopy

Lee, Sang Yeon, Chang, Jaewan, Choi, Jaehyung, Kim, Younsoo, Lim, HanJin, Jeon, Hyeongtag, Seo, Hyungtak

Journal:

Current Applied Physics

Year:

2017

Language:

english

File:

PDF, 1.10 MB

english, 2017

24

Effect of adding an insulator between metal and semiconductor layers on contact resistance

Kim, Hyunjung, Jang, Woochool, Lim, Heewoo, Kweon, Youngkyun, Bang, Minwook, Kwon, Saejin, Kim, Bumsik, Cho, Haewon, Jeon, Hyeongtag

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2018

Language:

english

File:

PDF, 988 KB

english, 2018

25

Synthesis, Characterization and Gas-Sensing Properties of Pristine and SnS2 Functionalized TeO2 Nanowires

Kim, Sangwoo, Bang, Jae Hoon, Choi, Myung Sik, Oum, Wansik, Mirzaei, Ali, Lee, Namgue, Kwon, Hyouk-Chon, Lee, Dohyung, Jeon, Hyeongtag, Kim, Sang Sub, Kim, Hyoun Woo

Journal:

Metals and Materials International

Year:

2018

Language:

english

File:

PDF, 2.49 MB

english, 2018

26

Tuning the electronic band structure and optoelectrical characteristics of ALD-grown Zn(O,S) buffer layers for SnS solar cells

Choi, Hyeongsu, Lee, Namgue, Park, Hyunwoo, Choi, Yeonsik, Yuk, Hyunwoo, Lee, Junghoon, Lee, Sung Gwon, Lee, Eun Jong, Jeon, Hyeongtag

Journal:

Year:

2021

File:

PDF, 1.09 MB

2021

27

Surface control of CdSe nanocrystals by UV-exposure in air and successive thermal treatment under ultra high vacuum

Hyun-Ju Choi, Seok-Joo Wang, Hyuncheol Kim, Hyung-Ho Park, Ho Jung Chang, Hyeongtag Jeon

Journal:

Applied Surface Science

Year:

2008

Language:

english

File:

PDF, 399 KB

english, 2008

28

Incorporation of carbon nanotube into direct-patternable ZnO thin film formed by photochemical solution deposition

Hyuncheol Kim, Hyeong-Ho Park, Hyeongtag Jeon, Ho Jung Chang, Youngchul Chang, Hyung-Ho Park

Journal:

Ceramics International

Year:

2009

Language:

english

File:

PDF, 475 KB

english, 2009

29

Effective formation of interface controlled Y2O3 thin film on Si(1 0 0) in a metal–(ferroelectric)–insulator–semiconductor structure

Kwang-Ho Kwon, Chang Ki Lee, Jun-Kyu Yang, Sun Gyu Choi, Ho Jung Chang, Hyeongtag Jeon, Hyung-Ho Park

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 203 KB

english, 2008

30

The electrical and optical properties of direct-patternable SnO2 thin films containing Pt nanoparticles at various annealing temperatures

Yong-June Choi, Hyung-Ho Park, Stephen Golledge, David C. Johnson, Ho Jung Chang, Hyeongtag Jeon

Journal:

Surface and Coatings Technology

Year:

2010

Language:

english

File:

PDF, 744 KB

english, 2010

31

Thermal-stress stability of yttrium oxide as a buffer layer of metal-ferroelectric-insulator-semiconductor field effect transistor

Chang Ki Lee, Woo Sik Kim, Hyung-Ho Park, Hyeongtag Jeon, Yeon Ho Pae

Journal:

Thin Solid Films

Year:

2005

Language:

english

File:

PDF, 355 KB

english, 2005

32

Study of Ag nanoparticles incorporated SnO2 transparent conducting films by photochemical metal–organic deposition

Hyuncheol Kim, Seok-Joo Wang, Hyung-Ho Park, Ho Jung Chang, Hyeongtag Jeon, Ross Henry Hill

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 437 KB

english, 2007

33

Carbon nanotube-incorporated direct-patternable SnO2 thin films formed by photochemical metal-organic deposition

Hyuncheol Kim, Hyeong-Ho Park, Ho Jung Chang, Hyeongtag Jeon, Hyung-Ho Park

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 465 KB

english, 2008

34

The growth of CoSi2 through an oxide layer: dependence on Si(100) surface structure

Jinhwa Heo, Hyeongtag Jeon

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 1.46 MB

english, 2000

35

Crystalline and electrical properties of (Bi,La)Ti3O12 thin films coated on Al2O3/Si substrates

Ho Jung Chang, Sun Hwan Hwang, Hyeongtag Jeon, Yeong Cheol Kim, Kazuaki Sawada, Makoto Ishida

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 1.56 MB

english, 2003

36

Dependence of the C49–C54 TiSi2 phase transition temperature on film thickness and Si substrate orientation

Hyeongtag Jeon, Gangjoong Yoon, R.J Nemanich

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 316 KB

english, 1997

37

The growth of CoSi2 using a Co/Zr bilayer on different Si substrates

Dongwook Kim, Hyeongtag Jeon

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 935 KB

english, 1999

38

Formation of nanocrystalline Fe–Co powders produced by mechanical alloying

Young Do Kim, Jin Youl Chung, Jongryoul Kim, Hyeongtag Jeon

Journal:

Materials Science and Engineering: A

Year:

2000

Language:

english

File:

PDF, 279 KB

english, 2000

39

The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition

Seungjun Lee, Seokhwan Bang, Joohyun Park, Soyeon Park, Wooho Jeong, Hyeongtag Jeon

Journal:

physica status solidi (a)

Year:

2010

Language:

english

File:

PDF, 358 KB

english, 2010

40

Role of postannealing temperature on the microstructure of Al2O3/ZnO thin films grown by atomic layer deposition for TFT applications

Yong Woon Jang, Seokhwan Bang, Hyeongtag Jeon, Jeong Yong Lee

Journal:

physica status solidi (a)

Year:

2010

Language:

english

File:

PDF, 728 KB

english, 2010

41

The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2

Taeyong Park, Dongjin Choi, Hagyoung Choi, Hyeongtag Jeon

Journal:

physica status solidi (a)

Year:

2012

Language:

english

File:

PDF, 405 KB

english, 2012

42

Effects of atomic layer deposition temperatures on structural and electrical properties of ZnO films and its thin film transistors

Su Cheol Gong, Seokhwan Bang, Hyeongtag Jeon, Hyung-Ho Park, Young Chul Chang, Ho Jung Chang

Journal:

Metals and Materials International

Year:

2010

Language:

english

File:

PDF, 686 KB

english, 2010

43

Post annealing effect of flexible polymer solar cells to improve their electrical properties

Su Cheol Gong, Seong Kyu Jang, Sang Ouk Ryu, Hyeongtag Jeon, Hyung-Ho Park, Ho Jung Chang

Journal:

Current Applied Physics

Year:

2010

Language:

english

File:

PDF, 557 KB

english, 2010

44

Luminescent mechanism of Eu3+-doped epitaxial Gd2O3 films grown on a Si (111) substrate using an effusion cell

Moon Hyung Jang, Yoon Ki Choi, Kwun Bum Chung, Hyeongtag Jeon, Mann-Ho Cho

Journal:

Current Applied Physics

Year:

2011

Language:

english

File:

PDF, 880 KB

english, 2011

45

Abnormal Grain Growth of Niobium-Doped Strontium Titanate Ceramics

Choelhwyi Bae, Jae-Gwan Park, Yoon-Ho Kim, Hyeongtag Jeon

Journal:

Journal of the American Ceramic Society

Year:

1998

Language:

english

File:

PDF, 1.56 MB

english, 1998

46

Interface Structure of Epitaxial CoSi2 Films Using the Chemical Oxide Layer on Si(1 0 0) Substrate

Youngchul Shin, Choelhwyi Bea, Hyeongtag Jeon

Journal:

Journal of Materials Science Letters

Year:

1999

Language:

english

File:

PDF, 105 KB

english, 1999

47

AZO/Au/AZO multilayer as a transparent conductive electrode

Seungjun Lee, Seokhwan Bang, Joohyun Park, Soyeon Park, Youngbin Ko, Hyeongtag Jeon

Journal:

physica status solidi (a)

Year:

2012

Language:

english

File:

PDF, 468 KB

english, 2012

48

The effects of a HfO2 buffer layer on Al2O3-passivated indium-gallium-zinc-oxide thin film transistors

Youngbin Ko, Seokhwan Bang, Seungjun Lee, Soyeon Park, Joohyun Park, Hyeongtag Jeon

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2011

Language:

english

File:

PDF, 292 KB

english, 2011

49

Synthesis of Cu dispersed Al2O3 nanocomposites by high energy ball milling and pulse electric current sintering

Young Do Kim, Sung-Tag Oh, Kyung Ho Min, Hyeongtag Jeon, In-Hyung Moon

Journal:

Scripta Materialia

Year:

2001

Language:

english

File:

PDF, 544 KB

english, 2001

50

Gadolinium nitride films deposited using a PEALD based process

Ziwen Fang, Paul A. Williams, Rajesh Odedra, Hyeongtag Jeon, Richard J. Potter

Journal:

Journal of Crystal Growth

Year:

2012

Language:

english

File:

PDF, 569 KB

english, 2012